Model 590光学监视器 Model 590 Optical Monitor
Model 590光学监视器 Model 590 Optical Monitor
DUN光学监视器使镀膜者对光学薄膜沉积进行精确控制，减少了工艺误差，提高了镀膜产量。我们的旗舰系统590型，被认为是具有无与伦比的鲁棒性 和易用性.
我们还推出了一套完整的现成配件来完成安装工作.我们的工程人员和内部制造也可根据您的要求提供自定义解决方案，以满足您的确切需求。
Model 590光学监视器 Model 590 Optical Monitor为今天的精密薄膜涂层提供了所需的最高精度。晶体监视器，通过设计，只测量一个涂层的质量，而不能检测到由于多个工艺变量之一的变化而引起的层密度的变化。如果不被捕捉到，层密度的变化会导致光学厚度的变化，这会导致性能急剧下降，并可能失去运行和收入。
精密层终端
减少过程误差
350-2500 nm波长范围
优越的Backgorund噪声抑制
反射或传输方式的作品
5年动态范围
条带记录仪模拟输出
USB接口
现场验证设计
备选方案：
用于连续波长选择的单色计。
光纤输入/输出
双接收器
光学监控的优势？
Model 590光学监视器 Model 590 Optical Monitor为今天的精密薄膜涂层提供了所需的最高精度。晶体监视器，通过设计，只测量一个涂层的质量，而不能检测到由于多个工艺变量之一的变化而引起的层密度的变化。如果不被捕捉到，层密度的变化会导致光学厚度的变化，这会导致性能急剧下降，并可能失去运行和收入。
另一方面，光学监视器通过测量涂层的反射率或透射率，对每一层的光学性能提供连续的实时监测。这种测量与已知的各层光学厚度之间的关系进行了比较，以便能够实现每一层的精确终止。
图1.0下面显示了一个典型的监测芯片反射率与厚度的关系图，这是由一个涂层设计软件包生成的。由实心垂直条所指出的图层终止点表示每一层的端点。当590光学监视器读出达到这些点时，操作者终止该层的沉积并推进到下一层。
Precision Layer Termination
Reduced Process Error
350-2500nm Wavelength Range
Superior Backgorund Noise Suppression
Works in Reflection or Transmission Modes
5 Decade Dynamic Range
Analog Output for Stripchart Recorder
USB Interface
Field-proven Design
Options:
Monochrometer for continuous wavelength selection.
Fiber Optic Input / Outputs
Dual Receivers
Advantages of Optical Monitoring?
Optical Monitoring provides the highest accuracy needed for today’s precision thin film coatings. Crystal monitors, by design, only measure the mass of a coating layer and cannot detect changes in the layer density caused by a variations in one of the many process variables. If not caught, a change in layer density results in a variation of the optical thickness which can lead to dramatic performance reductions and possible lost runs and revenue.
Optical monitors, on the other hand, provide continuous real-time monitoring of the optical performance of each layer by measuring the reflectance or transmission of the coating throughout the coating run. This measurement is compared against a well known relationship for the optical thickness of each layer so that precise termination of each layer can be achieved.
Figure 1.0 below shows a typical plot of monitor chip reflectance vs. thickness generated by a coating design software package. The layer termination points noted by the solid vertical bars indicate the end points of each layer. When the 590 Optical Monitor readout reaches these points, the operator terminates that layer deposition and advances to the next layer.
Optical Monitoring provides the highest accuracy needed for today’s precision thin film coatings. Crystal monitors, by design, only measure the mass of a coating layer and cannot detect changes in the layer density caused by a variations in one of the many process variables. If not caught, a change in layer density results in a variation of the optical thickness which can lead to dramatic performance reductions and possible lost runs and revenue.
